Know Everything about Gasonics - HiPOX System

HiPOX – High-pressure oxidation, A most popular method of depositing SiO2 films. The best thing about this oxidation method is it is able to permit the deposition of thick oxide films at roughly more than 10 times the rate of other different deposition methods.

HiPOX is an advanced level of patented, continuous, in-line, plug-flow oxidation process for water treatment. Which help to utilizes hydrogen peroxide and ozone to efficiently create hydroxyl radicals that easily destroy the organic compounds while minimizing bromate formation.

Gasonics is this only one company in the world, Who has successful produce such kind of a High-pressure oxidation system. But within a very short time, the company was eventually acquired by Novellus because of lack of strong marketing.

Advantage of HiPOX System

1. A very safe System

HiPOX is a very safe system with high H2 flow and low O2 Flow.

2. Reduced Crystalline Defects

When using the low-temperature high-pressure processing technique, crystalline defects vertical and lateral diffusion.

3. High Oxidation Rate

Operations of the system at 10 atmospheres pressure allow a typical oxidation rate of ten times.

Features:

• Flow rate stability and run uniformity

• Improved Temperature stability

• Gas Flow repeatability

• Safety interlocked load door

• Safe operation

• High purity Quartz tube

• HiPOX

• Careful pressure monitoring

• Ultra reliable tube seal

• Leak free performance

• High purity sealing materials

• Accurate Tube pressure reading

• High pressure vessel integrity

• No Power line noise generation

• One point one operational abort.